Applications of fullerene beams in analysis of thin layers

被引:9
作者
Czerwinski, B. [1 ]
Rzeznik, L. [1 ]
Stachura, K. [1 ]
Paruch, R. [1 ]
Garrison, B. J. [2 ]
Postawa, Z. [1 ]
机构
[1] Jagiellonian Univ, Smoluchowski Inst Phys, PL-30059 Krakow, Poland
[2] Penn State Univ, Dept Chem, University Pk, PA 16802 USA
基金
美国国家科学基金会;
关键词
sputtering; cluster bombardment; organic overlayers; SIMS/SNMS; molecular dynamics;
D O I
10.1016/j.vacuum.2008.01.042
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Molecular dynamics computer simulations have been employed to model ejection of particles from Ag{111} metal substrate and thin benzene overlayer bombarded by fullerene cluster projectiles. The sputtering yields are analyzed depending on the size (from C-20 up to C-540) and the kinetic energy (5-20 keV) of a projectile. It has been found that for clean metal substrate bombarded by 15 keV projectiles the maximum ejection is stimulated by the impact of the C-60 cluster. However, the size of the cluster projectile maximizing the yield depends on the kinetic energy of the cluster, shifting towards larger clusters as the impact energy increases. For a thin benzene overlayer, the yield increases monotonically with the size of the cluster within investigated range of fullerene projectiles and kinetic energies. (c) 2008 Published by Elsevier Ltd.
引用
收藏
页码:1120 / 1123
页数:4
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