Three-dimensional microfabrication by femtosecond pulses in dielectrics

被引：37
作者：
Kondo, T
Yamasaki, K
Juodkazis, S
Matsuo, S
Mizeikis, V
Misawa, H [1 ]
机构：
[1] Hokkaido Univ, Res Inst Elect Sci, Sapporo, Hokkaido 0600812, Japan
[2] Univ Tokushima, Ecosyst Engn Dept, Tokushima 7708506, Japan
[3] Univ Tokushima, Satellite Venture Business Lab, Tokushima 7708506, Japan
来源：
THIN SOLID FILMS | 2004年 / 453卷
关键词：
femtosecond laser microfabrication; polymers; polymethylmethacrylate (PMMA); nano-fabrication; micro-fabrication; dielectric breakdown;
D O I：
10.1016/j.tsf.2003.11.180
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We report femtosecond laser microfabrication in thin films of polymeric photoresists by (i) direct laser writing and (ii) holographic recording techniques. With (i) we have fabricated empty microchannels in polymethylmethacrylate; the channel width closely follows the intensity distribution in the focal spot of a high numerical aperture lens in accordance with scalar and vectorial Debye theory. With (ii) we have fabricated free-standing two-dimensional periodic structures in SU8 photoresist. The structures contain cylindrical pillars with noticeable ripple-like modulation of their diameter along their axes. This modulation results from the interference between the waves incident on the sample and back-reflected from the glass substrate or air, and is explained using an appropriate numerical modeling. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码：550 / 556
页数：7
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