Full range optical and electrical properties of Zn-doped SnO2 and oxide/metal/oxide multilayer thin films deposited on flexible PET substrate

被引：40
作者：
Cho, Yoonho [1 ,2 ]
Parmar, Narendra S. [1 ]
Nahm, Sahn [2 ]
Choi, Ji-Won [1 ,3 ]
机构：
[1] Korea Inst Sci & Technol, Ctr Elect Mat, Seoul 02792, South Korea
[2] Korea Univ, Dept Mat Sci & Engn, Seoul 136713, South Korea
[3] Korea Univ Sci & Technol, Dept Nanomat Sci & Engn, Daejeon 34113, South Korea
来源：
JOURNAL OF ALLOYS AND COMPOUNDS | 2017年 / 694卷
关键词：
CCS; TCO; OMO multilayer; SnO2; Doping; Optical and electrical properties; INDIUM-TIN-OXIDE; ROOM-TEMPERATURE; TRANSPARENT; GROWTH; ITO;
D O I：
10.1016/j.jallcom.2016.09.293
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
As a potential replacement of indium-tin oxide (ITO), Zn-doped SnO2/Ag/Zn-doped SnO2 multilayer transparent conducting electrodes were prepared on the flexible poly ethylene terephthalate (PET) substrates by RF sputtering at room temperature. To find the optimized composition of Zn-doped SnO2 thin film, which will have higher conductivity and transmittance as compared to the undoped SnO2 thin film, an off-axis Continuous Composition Spread (CCS) sputtering method was used. Zn-doped SnO2 thin films have lower resistivity than undoped SnO2 thin films due to excess oxygen vacancies (V-o) and/or zin interstitials (Zn-i) in thin films. The minimum resistivity of thin film was 0.13 Omega cm at optimized 2.43 wt% Zn-doping. Zn-doped SnO2/Ag/Zn-doped SnO2 multilayer thin films were prepared using the optimized composition deposited by an on-axis RF sputter. The multilayer TCO film has the resistivity similar to 5.33 x 10(-5) Omega cm and the average transmittance >85% in the 550 nm wavelength region. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码：217 / 222
页数：6
相关论文
共 23 条
[1]  
[Anonymous], J PHYS D
[2]   Influence of Zn doping on electrical and optical properties of multilayered tin oxide thin films [J].
Bhat, J. S. ;
Maddani, K. I. ;
Karguppikar, A. M. .
BULLETIN OF MATERIALS SCIENCE, 2006, 29 (03) :331-337
[3]   The effect of Zn concentration on some physical properties of tin oxide films obtained by ultrasonic spray pyrolysis [J].
Bilgin, V ;
Kose, S ;
Atay, F ;
Akyuz, I .
MATERIALS LETTERS, 2004, 58 (29) :3686-3693
[4]   Highly flexible, transparent, and low resistance indium zinc oxide-Ag-indium zinc oxide multilayer anode on polyethylene terephthalate substrate for flexible organic light-emitting diodes [J].
Cho, Sung-Woo ;
Jeong, Jin-A ;
Bae, Jung-Hyeok ;
Moon, Jong-Min ;
Choi, Kwang-Hyuk ;
Jeong, Soon Wook ;
Park, No-Jin ;
Kim, Jang-Joo ;
Lee, Se Hyung ;
Kang, Jae-Wook ;
Yi, Min-Su ;
Kim, Han-Ki .
THIN SOLID FILMS, 2008, 516 (21) :7881-7885
[5]   Electrical and optical properties of N-doped SnO2 thin films prepared by magnetron sputtering [J].
Ding, Xiaoxiong ;
Fang, Feng ;
Jiang, Jianqing .
SURFACE & COATINGS TECHNOLOGY, 2013, 231 :67-70
[6]   Electrical and optical properties of nitrogen doped SnO2 thin films deposited on flexible substrates by magnetron sputtering [J].
Fang, Feng ;
Zhang, Yeyu ;
Wu, Xiaoqin ;
Shao, Qiyue ;
Xie, Zonghan .
MATERIALS RESEARCH BULLETIN, 2015, 68 :240-244
[7]   Transparent conducting oxides for photovoltaics [J].
Fortunato, Elvira ;
Ginley, David ;
Hosono, Hideo ;
Paine, David C. .
MRS BULLETIN, 2007, 32 (03) :242-247
[8]   TCO/metal/TCO structures for energy and flexible electronics [J].
Guillen, C. ;
Herrero, J. .
THIN SOLID FILMS, 2011, 520 (01) :1-17
[9]   Comparison of electrical, optical, structural, and interface properties of IZO-Ag-IZO and IZO-Au-IZO multilayer electrodes for organic photovoltaics [J].
Jeong, Jin-A ;
Park, Yong-Seok ;
Kim, Han-Ki .
JOURNAL OF APPLIED PHYSICS, 2010, 107 (02)
[10]   Improvement of a-Si solar cell properties by using SnO2:F TCO films coated with an ultra-thin TiO2 layer prepared by APCVD [J].
Kambe, M. ;
Fukawa, M. ;
Taneda, N. ;
Sato, K. .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2006, 90 (18-19) :3014-3020
123