Effect of Gas Atmosphere on Ag-Embedded ZnO Nanofilms: Structural, Optical and Electrical Properties

被引：0

作者：

Kim, Jin-Hwan ^{[1
,2
]}

Kim, Haslin ^{[3
]}

Vaseem, Mohammed ^{[4
]}

Hahn, Yoon-Bong ^{[1
,2
,4
]}

机构：

[1] Chonbuk Natl Univ, Sch Semicond & Chem Engn, Jeonju 561756, South Korea

[2] Chonbuk Natl Univ, Nanomat Proc Res Ctr, Jeonju 561756, South Korea

[3] Univ British Columbia, Dept Chem & Biol Engn, Vancouver, BC V6T 1Z4, Canada

[4] Chonbuk Natl Univ, Dept BIN Fus Technol, Jeonju 561756, South Korea

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2013年 / 13卷 / 10期

关键词：

ZnO Nanofilms; Ag Embedding; Gas Atmosphere; Transparency; Conductivity; TRANSPARENT CONDUCTING OXIDES; PULSED-LASER DEPOSITION; THIN-FILMS; ZINC-OXIDE; NANOROD ARRAYS; ELECTRODE; FABRICATION; SYSTEM; GROWTH; NANOSTRUCTURES;

D O I：

10.1166/jnn.2013.7558

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The effects of gas atmosphere and sputter time for depositing silver (Ag) on the structural, optical and electrical properties of ZnO/Ag/ZnO transparent conducting oxide (TCO) films have been investigated with sputtering Ag target in Ar or N-2. It was found that the properties of the Ag and ZnO/Ag/ZnO films are quite dependent on the gas environment and the sputter time. The optical transparency of ZnO/Ag/ZnO films was easily controllable when sputtering the Ag target in N2 rather than in Ar. With optimizing the sputter time and atmosphere for Ag adsorption, the ZnO-based TCO films where the Ag layer was embedded in N-2 yielded low resistance of 6.1-9.1 Omega/sq and high transmittance of 93-96% over the visible range of wavelengths.

引用

页码：6860 / 6865

页数：6

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