Advances in glass Microfabrication Femtosecond laser irradiation followed by chemical etching

被引：0

作者：

Venturini, Francesco ^{[1
]}

Sansotera, Maurizio ^{[1
]}

Osellame, Roberto ^{[2
]}

Cerullo, Giulio ^{[2
]}

Navarrini, Walter ^{[1
]}

机构：

[1] Politecn Milan, Dipartimento Chim Mat & Ingn Chim Giulio Natta, I-20133 Milan, Italy

[2] Politecn Milan, Dipartimento Fis, Ist Foton & Nanotecnol CNR, I-20133 Milan, Italy

来源：

CHIMICA OGGI-CHEMISTRY TODAY | 2012年 / 30卷 / 06期

关键词：

Femtosecond laser; Micromachining; Glass; Etching; FUSED-SILICA; DIRECT FLUORINATION; FABRICATION; MECHANISM;

D O I：

暂无

中图分类号：

Q81 [生物工程学（生物技术）]; Q93 [微生物学];

学科分类号：

071005 ; 0836 ; 090102 ; 100705 ;

摘要：

Femtosecond laser irradiation followed by chemical etching (F.L.I.C.E.) is an emerging technique for the fabrication of directly buried, three-dimensional microfluidic channels in silica. The procedure attested in literature, which has been widely studied in the past years, consists of irradiating a glass slab and subsequently apply a chemical etching step. The results obtained by different research groups vary widely. In this paper we present a review of the most recent advancements of this technique discussing several critical factors that affect the aspect ratio, the length and the etching speed of the microchannel.

引用

页码：10 / 12

页数：3

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