Micro gear pumps for dosing of viscous fluids

被引：51

作者：

Dopper, J

Clemens, M

Ehrfeld, W

Jung, S

Kamper, KP

Lehr, H

机构：

[1] Inst. of Microtechnology Mainz GmbH, D-55129 Mainz

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1997年 / 7卷 / 03期

关键词：

D O I：

10.1088/0960-1317/7/3/040

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Gear pumps using micro gear wheels with diameters of 596 and 1192 mu m and a height of 500 mu m have been realized at IMM by means of a combination of LIGA technology and precision engineering. Using oil as pumping medium the pumps achieve back pressures of more than 1200 hPa and flow rates of up to 1 ml min(-1), The self-filling pumps tolerate air bubbles and particles contained in the working medium. The gear pumps displace 82 and 213 nl respectively per revolution, i.e. they oiler the possibility of very precise dosing of viscous fluids, such as oil.

引用

页码：230 / 232

页数：3