GaN-Based Light-Emitting Diodes Grown on Photonic Crystal-Patterned Sapphire Substrates by Nanosphere Lithography

被引：37
作者：
Su, Yan-Kuin [1 ,2 ]
Chen, Jian-Jhong [1 ,2 ]
Lin, Chuing-Liang [4 ]
Chen, Shi-Ming [4 ]
Li, Wen-Liang [3 ]
Kao, Chien-Chih [5 ]
机构：
[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 701, Taiwan
[3] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Tainan 701, Taiwan
[4] Kun Shan Univ, Dept Elect Engn, Tainan 710, Taiwan
[5] Natl Cheng Kung Univ, Inst Electroopt Sci & Engn, Tainan 701, Taiwan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2008年 / 47卷 / 08期
关键词：
GaN; light-emitting diode (LED); photonic crystal; patterned sapphire substrate; nanosphere lithography;
D O I：
10.1143/JJAP.47.6706
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
GaN-based light-emitting diodes (LEDs) grown on photonic crystal-patterned sapphire substrates (PCPSS) have been demonstrated. PCPSS was fabricated by nanosphere lithography, and the photonic crystal structure was the hexagonal-lattice pattern. The forward voltages of PCPSS and patterned sapphire substrates (PSS) LEDs were smaller than that of conventional sapphire substrates (CSS) LED, and it infers the epitaxial film quality of PCPSS and PSS LEDs has been slightly improved. The luminance intensity of PCPSS LED was 1.63 and 1.51 times higher than those of CSS and PSS LED at 2.0 mA injection current. The enhancement in the luminance intensity of PCPSS LED is attributed to the photonic crystal structure.
引用
收藏
页码：6706 / 6708
页数：3
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共 13 条
  • [1] Fabrication of two-dimensional photonic crystal patterns on GaN-based light-emitting diodes using thermally curable monomer-based nanoimprint lithography
    Byeon, Kyeong-Jae
    Hwang, Seon-Yong
    Lee, Heon
    [J]. APPLIED PHYSICS LETTERS, 2007, 91 (09)
  • [2] High extraction efficiency of spontaneous emission from slabs of photonic crystals
    Fan, SH
    Villeneuve, PR
    Joannopoulos, JD
    Schubert, EF
    [J]. PHYSICAL REVIEW LETTERS, 1997, 78 (17) : 3294 - 3297
  • [3] Enhanced luminescence from GaN-based blue LEDs grown on grooved sapphire substrates
    Feng, ZH
    Lau, KM
    [J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2005, 17 (09) : 1812 - 1814
  • [4] Controllable two-dimensional photonic crystal patterns fabricated by nanosphere lithography
    Han, S
    Hao, ZB
    Wang, J
    Luo, Y
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (04): : 1585 - 1588
  • [5] Enhanced light extraction from GaN-based light-emitting diodes with holographically generated two-dimensional photonic crystal patterns
    Kim, DH
    Cho, CO
    Roh, YG
    Jeon, H
    Park, YS
    Cho, J
    Im, JS
    Sone, C
    Park, Y
    Choi, WJ
    Park, QH
    [J]. APPLIED PHYSICS LETTERS, 2005, 87 (20) : 1 - 3
  • [6] Enhanced light extraction from GaN-based green light-emitting diode with photonic crystal
    Kim, Ja-Yeon
    Kwon, Min-Ki
    Lee, Ki-Sung
    Park, Seong-Ju
    Kim, Sang Hoon
    Lee, Ki-Dong
    [J]. APPLIED PHYSICS LETTERS, 2007, 91 (18)
  • [7] Increase of light extraction from GaN based light emitting diodes incorporating patterned structure by colloidal lithography
    Kim, Tae Sun
    Kim, Sang-Mook
    Jang, Yun Hee
    Jung, Gun Young
    [J]. APPLIED PHYSICS LETTERS, 2007, 91 (17)
  • [8] III-nitride blue and ultraviolet photonic crystal light emitting diodes
    Oder, TN
    Kim, KH
    Lin, JY
    Jiang, HX
    [J]. APPLIED PHYSICS LETTERS, 2004, 84 (04) : 466 - 468
  • [9] High-extraction-efficiency blue light-emitting diode using extended-pitch photonic crystal
    Orita, K
    Tamura, S
    Takizawa, T
    Ueda, T
    Yuri, M
    Takigawa, S
    Ueda, D
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (8B): : 5809 - 5813
  • [10] Solid-state light sources getting smart
    Schubert, EF
    Kim, JK
    [J]. SCIENCE, 2005, 308 (5726) : 1274 - 1278
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