Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling

被引：5
|
作者：
Biberger, Roland [1 ]
Benstetter, Guenther [1 ]
Schweinboeck, Thomas [2 ]
Breitschopf, Peter [1 ]
Goebel, Holger [3 ]
机构：
[1] Univ Appl Sci Deggendorf, D-94469 Deggendorf, Germany
[2] Infineon Technol, Failure Anal, D-81739 Munich, Germany
[3] Univ Bundeswehr Hamburg, Helmut Schmidt Univ, D-22043 Hamburg, Germany
来源：
MICROELECTRONICS RELIABILITY | 2008年 / 48卷 / 8-9期
关键词：
6;
D O I：
10.1016/j.microrel.2008.06.013
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This study compares two different methods of scanning capacitance microscopy (SCM). The first and approved one operates in contact mode and the second novel one in intermittent-contact (IC) mode. Measurements were performed on several samples and the results are compared. New technical expertises on the novel intermittent-contact method are shown and in conclusion assets and drawbacks of this SCM method are emphasized. (C) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1339 / 1342
页数：4
相关论文
共 45 条
  • [41] Steep Slope p-type 2D WSe2 Field-Effect Transistors with Van Der Waals Contact and Negative Capacitance
    Wang, Jingli
    Guo, Xuyun
    Yu, Zhihao
    Ma, Zichao
    Liu, Yanghui
    Chan, Masun
    Zhu, Ye
    Wang, Xinran
    Chai, Yang
    2018 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2018,
  • [42] Scanning spreading resistance microscopy (SSRM) 2D carrier profiling for ultra-shallow junction characterization in deep-submicron technologies
    Eyben, P
    Janssens, T
    Vandervorst, W
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2005, 124 : 45 - 53
  • [43] The R-linear convergence rate of an algorithm arising from the semi-smooth Newton method applied to 2D contact problems with friction
    Kucera, Radek
    Motyckova, Kristina
    Markopoulos, Alexandros
    COMPUTATIONAL OPTIMIZATION AND APPLICATIONS, 2015, 61 (02) : 437 - 461
  • [44] The R-linear convergence rate of an algorithm arising from the semi-smooth Newton method applied to 2D contact problems with friction
    Radek Kučera
    Kristina Motyčková
    Alexandros Markopoulos
    Computational Optimization and Applications, 2015, 61 : 437 - 461
  • [45] Quantitative Subsurface Atomic Structure Fingerprint for 2D Materials and Heterostructures by First-Principles-Calibrated Contact-Resonance Atomic Force Microscopy
    Tu, Qing
    Lange, Bjorn
    Parlak, Zehra
    Lopes, Joao Marcelo J.
    Blum, Volker
    Zauscher, Stefan
    ACS NANO, 2016, 10 (07) : 6491 - 6500
12345