Characterization study of plasma polymerized hexamethyldisiloxane thin films

被引：0
|
作者：
Lee, SH
Park, JK
Park, GB
Cho, KS
Woo, HW
Lee, DC
机构：
来源：
PROCEEDINGS OF THE 5TH INTERNATIONAL CONFERENCE ON PROPERTIES AND APPLICATIONS OF DIELECTRIC MATERIALS, VOLS 1 AND 2 | 1997年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, we investigated characteristics of Hexamethyldisiloxane thin films by plasma polymerization. Thin films were prepared by interelectrode capacitively coupled type apparatus and on conditions with carrier gas flow rate of 11 [cc/min], gas pressure of 0.1 [Torr], discharge frequency of 13.56 [MHz] and discharge power of 30 similar to 90 [W]. The relative dielectric constant and dielectric loss tangent of thin films showed 3.212 similar to 3.805 and 0.0026 similar to 0.0451 in alternating-frequency of 10(3) similar to 10(6) [Hz].
引用
收藏
页码：639 / 641
页数：3
相关论文
共 50 条
  • [1] A SEM study of plasma-polymerized hexamethyldisiloxane thin films
    Radeva, E
    VACUUM, 1997, 48 (01) : 41 - 42
  • [2] Plasma polymerized hexamethyldisiloxane thin films for corrosion protection
    Saloum, S.
    Alkhaled, B.
    Alsadat, W.
    Kakhia, M.
    Shaker, S. A.
    MODERN PHYSICS LETTERS B, 2018, 32 (03):
  • [3] Synthesis and characterization of plasma-polymerized hexamethyldisiloxane films
    Kurosawa, S
    Choi, BG
    Park, JW
    Aizawa, H
    Shim, KB
    Yamamoto, K
    THIN SOLID FILMS, 2006, 506 : 176 - 179
  • [4] Characterization of Plasma Polymerized Hexamethyldisiloxane Films Prepared by Arc Discharge
    Lazauskas, Algirdas
    Baltrusaitis, Jonas
    Grigaliunas, Viktoras
    Jucius, Dalius
    Guobiene, Asta
    Prosycevas, Igoris
    Narmontas, Pranas
    PLASMA CHEMISTRY AND PLASMA PROCESSING, 2014, 34 (02) : 271 - 285
  • [5] Characterization of Plasma Polymerized Hexamethyldisiloxane Films Prepared by Arc Discharge
    Algirdas Lazauskas
    Jonas Baltrusaitis
    Viktoras Grigaliūnas
    Dalius Jucius
    Asta Guobienė
    Igoris Prosyčevas
    Pranas Narmontas
    Plasma Chemistry and Plasma Processing, 2014, 34 : 271 - 285
  • [6] Effect of surface modification on the properties of plasma-polymerized hexamethyldisiloxane thin films
    Saloum, Saker
    Abou Shaker, Samer
    Alkafri, M. Nidal
    Obaid, Asmhan
    Hussin, Rokayya
    SURFACE AND INTERFACE ANALYSIS, 2019, 51 (07) : 754 - 762
  • [7] PLASMA POLYMERIZED HEXAMETHYLDISILOXANE THIN FILMS FOR NO2 GAS SENSOR APPLICATION
    Radeva, E.
    Georgieva, V.
    Lazarov, J.
    Gadjanova, V.
    Tsankov, D.
    DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES, 2014, 9 (02) : 459 - 466
  • [8] Preparation and characterization of thin films by plasma polymerization of hexamethyldisiloxane
    Inha Univ, Inchon, Korea, Republic of
    Thin Solid Films, 1 /2 (83-86):
  • [9] Preparation and characterization of thin films by plasma polymerization of hexamethyldisiloxane
    Lee, SH
    Lee, DC
    THIN SOLID FILMS, 1998, 325 (1-2) : 83 - 86
  • [10] Response of Plasma-Polymerized Hexamethyldisiloxane Films to Aqueous Environments
    Blanchard, Noemi E.
    Naik, Vikrant V.
    Geue, Thomas
    Kahle, Olaf
    Hegemann, Dirk
    Heuberger, Manfred
    LANGMUIR, 2015, 31 (47) : 12944 - 12953
12345