Low propagation loss in a one-port resonator fabricated on single-crystal diamond

被引：2

作者：

Fujii, Satoshi ^{[1
]}

Odawara, Tatsuya ^{[2
]}

Omori, Tatsuya ^{[2
]}

Hashimoto, Ken-ya ^{[2
]}

Torii, Hironori ^{[3
]}

Umezawa, Hitoshi ^{[4
]}

Shikata, Shinichi ^{[2
,4
]}

机构：

[1] Chiba Univ, Acad Ind Collaborat & Intellectual Property, Chiba, Japan

[2] Chiba Univ, Elect & Elect Engn, Chiba, Japan

[3] MES AFTY Corp, Tokyo, Japan

[4] AIST, Diamond Res Lab, Tsukuba, Ibaraki, Japan

来源：

2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2011年

基金：

日本学术振兴会;

关键词：

single crystal of diamond; AlN; one port SAW resonator;

D O I：

10.1109/ULTSYM.2011.0134

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Diamond has the highest known surface acoustic wave (SAW) phase velocity, sufficient for applications in the gigahertz range. However, although numerous studies have demonstrated SAW devices on polycrystalline diamond thin films, all have large propagation loss in comparison to single-crystal materials such as LiNbO3. In this study, we successfully fabricated low-propagation-loss one-port SAW resonators on single-crystal diamond synthesized using a high-pressure and high-temperature method. The devices had an interdigital transducer (IDT)/AlN/diamond structure. The best performing device exhibited a resonance frequency of 5.3 GHz and a Q-value of 2440. After correcting for ohmic losses, the propagation loss was found to be 0.012dB/wavelength. Furthermore, a large fQ product value of 10(13) was also obtained. These results show that single-crystal diamond SAW resonators have great potential for use in 5-GHz-band oscillators.

引用

页码：555 / 558

页数：4

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