Surface roughness measurement by means of polychromatic speckle elongation

被引:27
|
作者
Lehmann, P
Patzelt, S
Schone, A
机构
[1] Institut für Mess- Regelungs- und Systemtechnik, University of Bremen, Bremen, 28334
来源
APPLIED OPTICS | 1997年 / 36卷 / 10期
关键词
surface roughness; in-process measurement; speckle elongation; speckle intensity correlation; polychromatic light scattering;
D O I
10.1364/AO.36.002188
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A new approach for determining the roughness of engineering surfaces that is applicable to industrial in-process measurements is introduced. Laser speckle patterns, arising from light scattered from rough surfaces that are illuminated by polychromatic laser light, are detected in the far-field region. The incoherent superposition of these Light intensities and the angular dispersion cause the effect of speckle elongation. This is characterized by increasing speckle widths and leads to a radial structure of the speckle patterns. With increasing surface roughness, the elongation is replaced more and more by the decorrelation of the monochromatic speckle patterns for the different wavelengths. Such effects were detected with the CCD technique and analyzed by local autocorrelation functions of intensity fluctuations that were calculated for different areas of the speckle patterns. The results of surface-roughness determination by means of the speckle elongation effect are presented. (C) 1997 Optical Society of America.
引用
收藏
页码:2188 / 2197
页数:10
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