共 50 条
- [41] Incident angle dependence of O2 cluster ions on Ta2O5 thin film properties JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (6B): : 3951 - 3954
- [42] AFM analysis of Ta2O5 insulator film and the I-V characteristics investigation of the MIM thin film diode Guti Dianzixue Yanjiu Yu Jinzhan/Research and Progress of Solid State Electronics, 1999, 19 (04): : 372 - 376
- [43] Properties and reliability of Ta2O5 thin films deposited on Ta Proceedings - Electronic Components and Technology Conference, 1999, : 1042 - 1046
- [46] Effect of deposition temperature on dielectric properties of PECVD Ta2O5 thin film Journal of Materials Science, 1994, 29 (12): : 3372 - 3375
- [47] Effect of substrate temperature on the structure and optical properties of the Ta2O5 thin film Gongneng Cailiao/Journal of Functional Materials, 2013, 44 (23): : 3405 - 3407
- [50] Fast-response ultraviolet photodetector based on Ta2O5 thin film Journal of Materials Science: Materials in Electronics, 2023, 34