Depth elemental characterization of 1D self-aligned TiO2 nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES)

被引：22

作者：

Mohajernia, Shiva ^{[1
]}

Mazare, Anca ^{[1
]}

Hwang, Imgon ^{[1
]}

Gaiaschi, Sofia ^{[2
]}

Chapon, Patrick ^{[2
]}

Hildebrand, Helga ^{[1
]}

Schmuki, Patrik ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Dept Mat Sci, WW4, LKO, Erlangen, Germany

[2] HORIBA FRANCE SAS, Ave Vauve Passage Jobin Yvon, Palaiseau, France

来源：

APPLIED SURFACE SCIENCE | 2018年 / 442卷

关键词：

TiO2; nanotube; Anodization; Depth profile; Glow discharge optical emission; spectroscopy; OXIDE NANOTUBES; LAYERS;

D O I：

10.1016/j.apsusc.2018.02.185

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this work we study the depth composition of anodic TiO2 nanotube layers. We use elemental depth profiling with Glow Discharge Optical Emission Spectroscopy and calibrate the results of this technique with X-ray photoelectron spectroscopy (XPS) and energy dispersive spectroscopy (EDS). We establish optimized sputtering conditions for nanotubular structures using the pulsed RF mode, which causes minimized structural damage during the depth profiling of the nanotubular structures. This allows to obtain calibrated sputter rates that account for the nanotubular "porous" morphology. Most importantly, sputter-artifact free compositional profiles of these high aspect ratio 3D structures are obtained, as well as, in combination with SEM, elegant depth sectional imaging. (C) 2018 Elsevier B.V. All rights reserved.

引用

页码：412 / 416

页数：5

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