Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique

被引：39

作者：

Chen, Yuanfang ^{[1
]}

Pei, Weihua ^{[1
]}

Tang, Rongyu ^{[1
]}

Chen, Sanyuan ^{[1
]}

Chen, Hongda ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2013年 / 189卷

基金：

中国国家自然科学基金;

关键词：

Polydimethylsiloxane (PDMS); Parylene; Double casting; Replica molding; High-aspect-ratio; MICROFLUIDIC SYSTEMS; MICROFABRICATION; FABRICATION; POLYMER; MICRO; CELL;

D O I：

10.1016/j.sna.2012.09.024

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

As a simple method to fabricate a high quality copy of master, PDMS double casting technique has been more and more popular in microfluidics chips and bioMEMS application. In this work, the method in which conformal coating of parylene C serves as a demolding anti-adhesion layer in PDMS double casting technique was proposed. First casting was carried out onto master mold to generate negative PDMS mold and second casting was done onto negative PDMS mold likewise to generate positive PDMS replica with the same structure as master mold. Microstructures with aspect ratio from 4:1 to 20:1 and sharp angle from 5 degrees to 40 degrees were successfully obtained by using this new method. Experiments show replicas remain high fidelity to their masters. This new method of surface anti-adhesive treatment is environment friendly. Moreover, a single coating of parylene C can make the treated mold keep its anti-adhesive property for long lifecycle regardless of the number of replica molding cycles. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：143 / 150

页数：8

共 23 条

[1] Cell and protein compatibility of parylene-C surfaces [J].