Characterization of a surface-wave sustained plasma discharge in a co-axial structure

The present work introduces the preliminary experimental characterization of a low-pressure microwave discharge in a coaxial structure, The discharge radial description is simulated using a 1D-moment method code, which couples particle and energy transport to the field distribution and Poisson's equations. Cylindrical Langmuir probe and emission spectroscopy measurements are used to give a spatial description of the high-density plasma. The effects on probe characteristics of the high-intensity resonance field are mentionned. Radial profiles are compared to numerical simulations.