A new scanning heterodyne interferometer scheme for mapping both surface structure and effective local reflection coefficient

被引：13

作者：

Kwon, Kang Hyuk ^{[1
]}

Kim, Bong Soo ^{[1
]}

Cho, Kyuman ^{[1
,2
]}

机构：

[1] Sogang Univ, Dept Phys, Seoul 121742, South Korea

[2] Sogang Univ, Interdisciplinary Program Integrated Biotechnol, Seoul 121742, South Korea

来源：

OPTICS EXPRESS | 2008年 / 16卷 / 17期

关键词：

D O I：

10.1364/OE.16.013456

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new scanning microscope scheme which can map both phase and amplitude change of the probe beam is introduced. We will show that the true surface structure can be imaged by using the results of phase measurements while the amplitude image represents the map of the magnitude of the effective local reflection coefficient (ELRC). Relation between the surface structure and the ELRC is discussed. Spatial resolution is 0.67 mu m which is limited by diffraction and the precision for measuring point-to-point variation of the average height of the surface structure is a few nanometers. Potential of this microscopy on surface diagnostics is discussed. (C) 2008 Optical Society of America.

引用

页码：13456 / 13464

页数：9

共 17 条

[1] Scanning homodyne interferometer for characterization of piezoelectric films and microelectromechanical systems devices [J].