Improved inflection point method of emissive probe for accurate measurement of plasma potential

被引:18
作者
Li, Jian-quan [1 ,2 ]
Xu, Jun [1 ,2 ]
Bai, Yu-jing [1 ,2 ]
Lu, Wen-qi [1 ,2 ]
Wang, You-nian [2 ]
机构
[1] Dalian Univ Technol, Key Lab Mat Modificat Laser Ion & Electron Beams, Minist Educ, Dalian 116024, Peoples R China
[2] Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2016年 / 34卷 / 06期
关键词
MAGNETIC-FIELD; SPACE-CHARGE;
D O I
10.1116/1.4964834
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The potential of the inflection point of emissive probe characteristics (V-ip) in the limit of zero emission is considered to be an accurate indication of the plasma potential. Previous method for this limit is linearly extrapolating the change of V-ip with respect to the electron emission current I-emis to the limit I-emis approximate to 0, which may result in inaccurate results since evidences showed that V-ip does not change well linearly with I-emis. The authors found in this study that, instead of I-emis, V-ip changes linearly with the probe heating current (I-ht) which is a function of the probe temperature (T-p), and the phenomenon is reasonably interpreted by the space charge voltage increasing linearly with T-p. An improved inflection point method of emissive probe, which utilizes linear extrapolating the V-ip - I-ht relation to the heating current for initial emission, is proposed for accurate measurement of plasma potential. (C) 2016 American Vacuum Society.
引用
收藏
页数:4
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