共 50 条
Direct stress measurement of Si(111) 7 x 7 reconstruction
被引:3
|作者:
Asaoka, Hidehito
[1
,2
]
Yamazaki, Tatsuya
[1
,3
]
Yokoyama, Yuta
[2
]
Yamaguchi, Kenji
[1
]
机构:
[1] Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
[2] Japan Atom Energy Agcy, Adv Sci Res Ctr, Tokai, Ibaraki 3191195, Japan
[3] Eiko Engn Co Ltd, Hitachinaka, Ibaraki 3120024, Japan
关键词:
Stresses;
Surface structure;
Molecular beam epitaxy;
Semiconducting silicon;
ADSORPTION;
SI;
HYDROGEN;
SURFACE;
GROWTH;
GE;
DIFFUSION;
SI(100);
SI(001);
ATOMS;
D O I:
10.1016/j.jcrysgro.2012.12.124
中图分类号:
O7 [晶体学];
学科分类号:
0702 ;
070205 ;
0703 ;
080501 ;
摘要:
We have focused on stress measurements of the reconstructed Si(111) 7 x 7 and the H-terminated Si(111) 1 x 1 surfaces. In order to obtain information on both the surface stress and the surface structure simultaneously, we have combined the surface-curvature and the reflection-high-electron-energy-diffraction instrumentations in an identical ultrahigh vacuum system. At the beginning of Ge wetting layer growth on H-terminated Si(111), the stress gradient drastically changes accompanied by change in the surface structure resulting from the H desorption. Comparison of the surface stress behaviors between Ge wetting layer growth on the H-terminated Si(111) 1 x 1 and the Si(111) 7 x 7 surfaces reveals that the Si(111) 1 x 1 surface releases 1.6 N/m (=J/m(2)), or (1.3 eV/(1 x 1 unit cell)), of the surface energy from the strong tensile Si(111) 7 x 7 reconstruction. (c) 2013 Elsevier B.V. All rights reserved.
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页码:37 / 40
页数:4
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