Direct stress measurement of Si(111) 7 x 7 reconstruction
被引:3
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作者:
Asaoka, Hidehito
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Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Japan Atom Energy Agcy, Adv Sci Res Ctr, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Asaoka, Hidehito
[1
,2
]
Yamazaki, Tatsuya
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Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Eiko Engn Co Ltd, Hitachinaka, Ibaraki 3120024, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Yamazaki, Tatsuya
[1
,3
]
Yokoyama, Yuta
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Japan Atom Energy Agcy, Adv Sci Res Ctr, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Yokoyama, Yuta
[2
]
Yamaguchi, Kenji
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Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, JapanJapan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
Yamaguchi, Kenji
[1
]
机构:
[1] Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
[2] Japan Atom Energy Agcy, Adv Sci Res Ctr, Tokai, Ibaraki 3191195, Japan
[3] Eiko Engn Co Ltd, Hitachinaka, Ibaraki 3120024, Japan
We have focused on stress measurements of the reconstructed Si(111) 7 x 7 and the H-terminated Si(111) 1 x 1 surfaces. In order to obtain information on both the surface stress and the surface structure simultaneously, we have combined the surface-curvature and the reflection-high-electron-energy-diffraction instrumentations in an identical ultrahigh vacuum system. At the beginning of Ge wetting layer growth on H-terminated Si(111), the stress gradient drastically changes accompanied by change in the surface structure resulting from the H desorption. Comparison of the surface stress behaviors between Ge wetting layer growth on the H-terminated Si(111) 1 x 1 and the Si(111) 7 x 7 surfaces reveals that the Si(111) 1 x 1 surface releases 1.6 N/m (=J/m(2)), or (1.3 eV/(1 x 1 unit cell)), of the surface energy from the strong tensile Si(111) 7 x 7 reconstruction. (c) 2013 Elsevier B.V. All rights reserved.