Direct stress measurement of Si(111) 7 x 7 reconstruction

被引:3
|
作者
Asaoka, Hidehito [1 ,2 ]
Yamazaki, Tatsuya [1 ,3 ]
Yokoyama, Yuta [2 ]
Yamaguchi, Kenji [1 ]
机构
[1] Japan Atom Energy Agcy, Quantum Beam Sci Directorate, Tokai, Ibaraki 3191195, Japan
[2] Japan Atom Energy Agcy, Adv Sci Res Ctr, Tokai, Ibaraki 3191195, Japan
[3] Eiko Engn Co Ltd, Hitachinaka, Ibaraki 3120024, Japan
关键词
Stresses; Surface structure; Molecular beam epitaxy; Semiconducting silicon; ADSORPTION; SI; HYDROGEN; SURFACE; GROWTH; GE; DIFFUSION; SI(100); SI(001); ATOMS;
D O I
10.1016/j.jcrysgro.2012.12.124
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We have focused on stress measurements of the reconstructed Si(111) 7 x 7 and the H-terminated Si(111) 1 x 1 surfaces. In order to obtain information on both the surface stress and the surface structure simultaneously, we have combined the surface-curvature and the reflection-high-electron-energy-diffraction instrumentations in an identical ultrahigh vacuum system. At the beginning of Ge wetting layer growth on H-terminated Si(111), the stress gradient drastically changes accompanied by change in the surface structure resulting from the H desorption. Comparison of the surface stress behaviors between Ge wetting layer growth on the H-terminated Si(111) 1 x 1 and the Si(111) 7 x 7 surfaces reveals that the Si(111) 1 x 1 surface releases 1.6 N/m (=J/m(2)), or (1.3 eV/(1 x 1 unit cell)), of the surface energy from the strong tensile Si(111) 7 x 7 reconstruction. (c) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:37 / 40
页数:4
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