Advanced Process Control for Semiconductor Manufacturing

被引：0
作者：
Qin, S. Joe [1 ]
Hsieh, Ming [2 ]
Epstein, Daniel J. [3 ]
Ho, Weng Khuen [4 ]
机构：
[1] Univ So Calif, Mork Family Dept Chem Engn & Mat Sci, Los Angeles, CA 90089 USA
[2] Univ So Calif, Dept Elect Engn, Los Angeles, CA 90089 USA
[3] Univ So Calif, Dept Ind & Syst Engn, Los Angeles, CA 90089 USA
[4] Natl Univ Singapore, Dept Elect Engn, Singapore 117548, Singapore
来源：
JOURNAL OF PROCESS CONTROL | 2008年 / 18卷 / 10期
关键词：
D O I：
10.1016/j.jprocont.2008.11.002
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：915 / 915
页数：1
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