Spectroscopic imaging of self-organization in high power impulse magnetron sputtering plasmas

被引：54

作者：

Andersson, Joakim ^{[1
,2
]}

Ni, Pavel ^{[1
]}

Anders, Andre ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA

[2] Natl Univ Singapore, Ctr Quantum Technol, Singapore 117543, Singapore

来源：

APPLIED PHYSICS LETTERS | 2013年 / 103卷 / 05期

关键词：

DISCHARGE;

D O I：

10.1063/1.4817257

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Excitation and ionization conditions in traveling ionization zones of high power impulse magnetron sputtering plasmas were investigated using fast camera imaging through interference filters. The images, taken in end-on and side-on views using light of selected gas and target atom and ion spectral lines, suggest that ionization zones are regions of enhanced densities of electrons, and excited atoms and ions. Excited atoms and ions of the target material (Al) are strongly concentrated near the target surface. Images from the highest excitation energies exhibit the most localized regions, suggesting localized Ohmic heating consistent with double layer formation. (C) 2013 AIP Publishing LLC.

引用

页数：4

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