Growth and morphology of Er-doped GaN on sapphire and hydride vapor phase epitaxy substrates

被引:19
作者
Birkhahn, R [1 ]
Hudgins, R
Lee, D
Steckl, AJ
Molnar, RJ
Saleh, A
Zavada, JM
机构
[1] Univ Cincinnati, Nanoelect Lab, Cincinnati, OH 45221 USA
[2] MIT, Lincoln Lab, Lexington, MA 02173 USA
[3] Charles Evans & Associates, Sunnyvale, CA 94086 USA
[4] USA, Res Off, Res Triangle Pk, NC 27709 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 03期
关键词
D O I
10.1116/1.590722
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report the morphological and compositional characteristics and their effect on optical properties of Er-doped GaN grown by solid source molecular beam epitaxy on sapphire and hydride vapor phase epitaxy GaN substrates. The GaN was grown by molecular beam epitaxy on sapphire substrates using solid sources (for Ga, Al, and Er) and a plasma gas source for N-2 The emission spectrum of the GaN:Er films consists of two unique narrow green lines at 537 and 558 nm along with typical Er3+ emission in the infrared at 1.5 mu m. The narrow lines have been identified as Er3+ transitions from the H-2(11/2) and S-4(3/2) levels to the I-4(15/2) ground state. The morphology of the GaN:Er films showed that the growth resulted in either a columnar or more compact structure with no effect on green light emission intensity. (C) 1999 American Vacuum Society. [S0734-211X(99)06303-9].
引用
收藏
页码:1195 / 1199
页数:5
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