High-accuracy aspheric x-ray mirror metrology using Software Configurable Optical Test System/deflectometry

被引：58

作者：

Huang, Run ^{[1
]}

Su, Peng ^{[1
]}

Burge, James H. ^{[1
]}

Huang, Lei ^{[2
]}

Idir, Mourad ^{[2
]}

机构：

[1] Univ Arizona, Coll Opt Sci, Tucson, AZ 85721 USA

[2] Brookhaven Natl Lab, Upton, NY 11973 USA

来源：

OPTICAL ENGINEERING | 2015年 / 54卷 / 08期

关键词：

optics; metrology; deflectometry; calibration; x-ray optics; interferometry; ORTHONORMAL VECTOR POLYNOMIALS; UNIT-CIRCLE; DEFLECTOMETRY; SCOTS;

D O I：

10.1117/1.OE.54.8.084103

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The Software Configurable Optical Test System (SCOTS) uses deflectometry to measure surface slopes of general optical shapes without the need for additional null optics. Careful alignment of test geometry and calibration of inherent system error improve the accuracy of SCOTS to a level where it competes with interferometry. We report a SCOTS surface measurement of an off-axis superpolished elliptical x-ray mirror that achieves <1 nm root-mean-square accuracy for the surface measurement with low-order term included. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)

引用

页数：10

共 29 条

[1]

[Anonymous], P SPIE

[2] Diffractive optics calibrator: measurement of etching variations for binary computer-generated holograms [J].