SnO2:Cu films doped during spray pyrolysis deposition: The reasons of the gas sensing properties change

被引:13
作者
Korotcenkov, G. [1 ]
Boris, I. [2 ]
Cho, B. K. [1 ,3 ]
机构
[1] Gwangju Inst Sci & Technol, Dept Mat Sci & Engn, Kwangju 500712, South Korea
[2] State Univ Moldova, Dept Phys & Engn, MD-2009 Kishinev, Moldova
[3] Gwangju Inst Sci & Technol, Dept Nano Biomat & Elect, Kwangju 500712, South Korea
基金
新加坡国家研究基金会;
关键词
Thin films; Oxides; Chemical vapour deposition (CVD); Electrical characterisation; Microstructure; Defects; TIN DIOXIDE FILMS; THIN-FILM; SENSOR PROPERTIES; DOPING INFLUENCE; CARBON-MONOXIDE; METAL-OXIDES; COPPER; OXIDATION; H2S; REACTIVITY;
D O I
10.1016/j.matchemphys.2013.06.047
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The influence of Cu doping on electrophysical, structural and gas sensing properties of the SnO2 films deposited by spray pyrolysis was considered in this paper. It was shown that the addition of Cu in SnO2 even in small concentrations was accompanied by strong changes in the SnO2-based gas sensors performances. The reasons of observed changes were discussed. The conclusion was made that the decrease of response of heavy doped SnO2:Cu-based gas sensors was mainly connected with both structural disordering of heavy doped SnO2:Cu metal oxide, and the appearance of the fine dispersed phase formed in the SnO2 matrix. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:124 / 131
页数:8
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