Review-Critical Considerations of High Quality Graphene Synthesized by Plasma-Enhanced Chemical Vapor Deposition for Electronic and Energy Storage Devices

被引：29

作者：

Azam, Mohd Asyadi ^{[1
]}

Zulkapli, Nor Najihah ^{[1
]}

Dorah, Norasimah ^{[1
]}

Seman, Raja Noor Amalina Raja ^{[1
]}

Ani, Mohd Hanafi ^{[2
]}

Sirat, Mohd Shukri ^{[2
]}

Ismail, Edhuan ^{[2
]}

Fauzi, Fatin Bazilah ^{[2
]}

Mohamed, Mohd Ambri ^{[3
]}

Majlis, Burhanuddin Yeop ^{[3
]}

机构：

[1] Univ Tekn Malaysia Melaka, Fac Mfg Engn, Adv Mfg Ctr, Carbon Res Technol Res Grp, Durian Tunggal 76100, Melaka, Malaysia

[2] Int Islamic Univ Malaysia, Fac Engn, Kuala Lumpur 50728, Malaysia

[3] Univ Kebangsaan Malaysia, Inst Microengn & Nanoelectron, Bangi 43600, Malaysia

来源：

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | 2017年 / 6卷 / 06期

关键词：

FEW-LAYER GRAPHENE; LARGE-AREA; CARBON NANOWALLS; FIELD-EMISSION; BILAYER GRAPHENE; EPITAXIAL GRAPHENE; SCALE SYNTHESIS; OXIDE SHEETS; GROWTH; FILMS;

D O I：

10.1149/2.0031706jss

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Graphene is a promising electrode material not only due to its intrinsic properties like good electrical conductivity, high mechanical strength and high chemical stability, but also because of its high theoretical surface area of 2630 m(2) g(-1). In this report, the effect of CVD parameters to the growth of high quality graphene on metal substrates by using plasma enhanced chemical vapor deposition (PECVD) was extensively studied. Interestingly, synthesizing high quality graphene by PECVD technique is not only depending on the CVD parameters, but also depending on the catalysts and its plasma sources. It was found that Ni and Cu are the most favored metal catalysts for PECVD graphene growth. With high solubility of carbon (> 0.1 at. %), Ni effectively promote the growth of multilayer graphene by PECVD. However, large-area synthesis has made relatively inexpensive Cu as one of the most attractive substrates for monolayer graphene growth. Further details on the potential use of different transition metal catalysts in synthesizing graphene and consequently the specific usage of graphene based devices are discussed in this report. (C) The Author(s) 2017. Published by ECS.

引用

页码：M3035 / M3048

页数：14

共 148 条

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