Temperature Stable Electro-Optic Polymer Modulator using Ultra-Thin Silicon Waveguide

被引：0
|
作者：
Yokoyama, Shiyoshi [1 ,2 ]
Miura, Hiroki [2 ]
Feng, Qiu [1 ]
Spring, Andrew M. [1 ]
机构：
[1] Kyushu Univ, Inst Mat Chem & Engn, Fukuoka, Japan
[2] Kyushu Univ, Dept Mol & Mat Sci, Fukuoka, Japan
来源：
2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2017年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate the broadband electro-optical (EO) polymer modulator in the hybrid silicon Mach-Zehnder interferometer. The waveguide consists of the 50 nm-thick silicon core with the EO polymer cladding. The fabrication of the hybrid waveguide can be totally carried out by using the conventional photolithography technique. The recorded half-wave voltage (V-pi) of the modulator was 0.9 V at 1550 nm. The traveling-wave electrode was applied to the modulator to test the frequency response up to 40 GHz. The modulator showed the excellent temperature stability at 85 degrees C for longer than 2000 hours.
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