Dynamics of V-Shaped Electrothermal MEMS-Based Resonators

被引：17

作者：

Alcheikh, Nouha ^{[1
]}

Ouakad, Hassen M. ^{[2
]}

Younis, Mohammad I. ^{[1
]}

机构：

[1] King Abdullah Univ Sci & Technol, Phys Sci & Engn Div, Thuwal 239556900, Saudi Arabia

[2] Sultan Qaboos Univ, Coll Engn, Mech & Ind Engn Dept, Muscat 123, Oman

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2020年 / 29卷 / 05期

关键词：

Mathematical model; Resonators; Finite element analysis; Heat transfer; Actuators; Read only memory; Silicon; MEMS; V; and arc-shaped micro-resonators; electrothermal actuation; crossing and veering phenomenon; parameter study; MODE LOCALIZATION; SENSITIVITY; PARAMETER; BEHAVIOR; SILICON; DESIGN;

D O I：

10.1109/JMEMS.2020.3018193

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams. [2020-0232]

引用

页码：1372 / 1381

页数：10

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