MEMS Accelerometer with SAW

被引：0

作者：

Nefedov, V. G. ^{[1
]}

Shakin, O. V. ^{[1
]}

Grigoryev, L. V. ^{[2
]}

Morozov, I. S. ^{[2
]}

Zhuravlev, N. V. ^{[2
]}

机构：

[1] St Petersburg State Univ Aerosp Instrumentat, St Petersburg, Russia

[2] ITMO Univ, St Petersburg Natl Res Univ Informat Technol Mech, St Petersburg, Russia

来源：

2018 WAVE ELECTRONICS AND ITS APPLICATION IN INFORMATION AND TELECOMMUNICATION SYSTEMS (WECONF) | 2018年

基金：

俄罗斯基础研究基金会;

关键词：

MEMS technology; microaccelerometer with SAW; slaser stimulated plasma etching;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

was created the model of a microaccelerometer using MEMS technology. Were investigated the sensitivity and non-linear properties of the MEMS sensor in the commercial temperature range.

引用

页数：4

共 7 条

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