A standard to test the dynamics of vacuum gauges in the millisecond range

被引：17

作者：

Jousten, Karl ^{[1
]}

Pantazis, Sarantis ^{[1
]}

Buthig, Joachim ^{[1
]}

Model, Regine ^{[1
]}

Wueest, Martin ^{[2
]}

Iwicki, Jaroslaw ^{[3
]}

机构：

[1] Phys Tech Bundesanstalt, D-10587 Berlin, Germany

[2] INFICON AG, FL-9496 Balzers, Liechtenstein

[3] VACOM GmbH, D-07749 Jena, Germany

来源：

VACUUM | 2014年 / 100卷

关键词：

Vacuum metrology; Dynamic pressure; Choked flow; Response time; Vacuum gauge;

D O I：

10.1016/j.vacuum.2013.07.037

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Vacuum gauges that control fast processes in industrial applications, e.g. load locks, should immediately react to pressure changes. To study the response time of vacuum gauges to rapid pressure changes, a dynamic vacuum standard was developed where the pressure may change from 100 kPa to 100 Pa within 20 ms in a step-wise manner or within longer times up to 1 s in a predictable manner. This is accomplished by a very fast opening gate valve DN40 and exchangeable orifices and ducts through which the mass flow rate can be calculated by gas flow simulation software. A simple physical model can be used to approximate the calculations. Experiments have been performed with capacitance diaphragm gauges with improved electronics to give a read-out every 0.7 ms. Preliminary results indicate that their response time is at most 1.7 ms, but may be significantly less. (c) 2013 Elsevier Ltd. All rights reserved.

引用

页码：14 / 17

页数：4

共 6 条

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