New Floating Gate Memory with Excellent Retention Characteristics

被引:86
作者
Wang, Shuopei [1 ,2 ,3 ,4 ]
He, Congli [1 ,2 ,5 ]
Tang, Jian [1 ,2 ,3 ]
Lu, Xiaobo [1 ,2 ,3 ]
Shen, Cheng [1 ,2 ,3 ]
Yu, Hua [1 ,2 ,3 ]
Du, Luojun [1 ,2 ,3 ]
Li, Jiafang [1 ,2 ]
Yang, Rong [1 ,2 ,3 ,4 ,6 ]
Shi, Dongxia [1 ,2 ,3 ,6 ]
Zhang, Guangyu [1 ,2 ,3 ,4 ,6 ,7 ]
机构
[1] Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Beijing 100190, Peoples R China
[2] Chinese Acad Sci, Inst Phys, Beijing 100190, Peoples R China
[3] Univ Chinese Acad Sci, Sch Phys Sci, Beijing 100190, Peoples R China
[4] Songshan Lake Mat Lab, Dongguan 523808, Guangdong, Peoples R China
[5] Beijing Normal Univ, Inst Adv Mat, Beijing 100875, Peoples R China
[6] Beijing Key Lab Nanomat & Nanodevices, Beijing 100190, Peoples R China
[7] Collaborat Innovat Ctr Quantum Matter, Beijing 100190, Peoples R China
基金
美国国家科学基金会;
关键词
floating gate; MoS2; nonvolatile memory; van der Waals heterostructure; INTEGRATED-CIRCUITS; MOS2; PHOTOLUMINESCENCE; TRANSISTORS; MOBILITY;
D O I
10.1002/aelm.201800726
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In current flash memory, there is an inevitable tradeoff between the operation voltage and the retention time due to the incorporation of very thin tunneling layer in the device structure. In this work, a new type of robust floating gate nonvolatile memory based on 2D materials is introduced to reduce the operation voltage and promote the data retention time. By taking the advantage of a dual-gate structure, as-fabricated devices exhibit excellent performance with low operation voltage (as low as 5 V even the tunneling layer tBN 10 nm), long retention time (on/off ratio with negligible degeneration over 105 s), and ultralow off-leakage current (10-13 A, which is very attractive for ultralowpower applications). Charges trapped in the top gate originated from the capacitive coupling between the back and top gates are found to be responsible for the nonvolatile behavior. The new charge trapping mechanism, which is distinguished from that in the conventional single-gate memory devices, enables charge tunneling through a thicker tunneling layer at a low operation voltage. The achieved MoS2 nonvolatile memory with outstanding performances has great potentials for future information storage.
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页数:7
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