Micromachined silicon antennas

被引：6

作者：

Chen, Q ^{[1
]}

Fusco, VF ^{[1
]}

Zheng, M ^{[1
]}

Hall, PS ^{[1
]}

机构：

[1] Queens Univ Belfast, High Frequency Elect Lab, Dept Elect & Elect Engn, Belfast BT9 5AH, Antrim, North Ireland

来源：

ICMMT'98: 1998 INTERNATIONAL CONFERENCE ON MICROWAVE AND MILLIMETER WAVE TECHNOLOGY PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/ICMMT.1998.768282

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The effects of a new processing procedure for creating cantilevered conductors at edges of silicon trenches at radiating edges of silicon microstrip patch antenna and slot loop antenna are examined in this paper. It has been found that trenches with cantilevered conductors generated from back side of a wafer can effectively reduce the effective dielectric constant of the substrate, improve radiation patterns and enhance radiation efficiency when compared with those without trenches.

引用

页码：289 / 292

页数：4

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