Hall nano-probes fabricated by focused ion beam

被引：27
作者：
Candini, A.
Gazzadi, G. C.
Di Bona, A.
Affronte, M.
Ercolani, D.
Biasiol, G.
Sorba, L.
机构：
[1] CNR, INFM, Natl Res Ctr Nanostruct & Biosyst Surfaces S3, I-41100 Modena, Italy
[2] Univ Modena & Reggio Emilia, Dipartimento Fis, I-41100 Modena, Italy
[3] CNR, INFM, Lab Nazl Tecnol & Nanosci TASC, I-34012 Trieste, Italy
来源：
NANOTECHNOLOGY | 2006年 / 17卷 / 09期
关键词：
D O I：
10.1088/0957-4484/17/9/005
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Hall magnetometers with active areas down to 100 x 100 nm(2) were fabricated patterning gold and Si-doped GaAs films by focused ion beam. For GaAs probes, electrical characterization shows that the magnetic flux sensitivity is better than 10(-2)Phi(0) at room temperature. Hall nano-probes made of gold can work down to liquid helium temperature with magnetic flux sensitivity 10(-1)Phi(0).
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页码：2105 / 2109
页数：5
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