Nondestructive mapping of chemical composition and structural qualities of group III-nitride nanowires using submicron beam synchrotron-based X-ray diffraction

被引：2

作者：

Bonanno, P. L. ^{[1
]}

Gautier, S. ^{[2
,3
,4
]}

El Gmili, Y. ^{[4
]}

Moudakir, T. ^{[4
]}

Sirenko, A. A. ^{[5
]}

Kazimirov, A. ^{[6
]}

Cai, Z-H. ^{[7
]}

Martin, J. ^{[2
,3
,4
]}

Goh, W. H. ^{[1
]}

Martinez, A. ^{[8
]}

Ramdane, A. ^{[8
]}

Le Gratiet, L. ^{[8
]}

Maloufi, N. ^{[9
]}

Assouar, M. B. ^{[10
]}

Ougazzaden, A. ^{[1
]}

机构：

[1] UMI 2958 Georgia Tech CNRS, Georgia Inst Technol GTL, F-57070 Metz, France

[2] Univ Metz, UMR CNRS 7132, LMOPS UMI Lab Mat Opt Photon & Micronano Syst, F-57070 Metz, France

[3] SUPELEC, F-57070 Metz, France

[4] UMI 2958 Georgia Tech CNRS, F-57070 Metz, France

[5] New Jersey Inst Technol, Dept Phys, Newark, NJ 07102 USA

[6] Cornell Univ, CHESS, Ithaca, NY 14853 USA

[7] Argonne Natl Lab, Adv Photon Source, Argonne, IL 60439 USA

[8] UPR CNRS 20, Lab Photon & Nanostruct, F-91460 Marcoussis, France

[9] Lab Etud Textures & Applicat Mat UMR CNRS 7078 Il, F-57045 Metz 1, France

[10] Nancy Univ, CNRS, Lab Phys Milieux Ionises & Applicat, F-54506 Vandoeuvre Les Nancy, France

来源：

THIN SOLID FILMS | 2013年 / 541卷

关键词：

Nondestructive; GaN; Synchrotron; X-ray diffraction; Nano; Nanowire; RSM; MQW; QUANTUM DOTS; GROWTH;

D O I：

10.1016/j.tsf.2012.12.099

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Submicron beam synchrotron-based X-ray diffraction (XRD) techniques have been developed and used to accurately and nondestructively map chemical composition and material quality of selectively grown group nanowires. GaN, AlGaN, and InGaN multi-quantum-well nanowires have been selectively grown on lattice matched and mismatched substrates, and the challenges associated with obtaining and interpreting submicron beam XRD results are addressed and solved. Nanoscale cathodoluminescence is used to examine exciton behavior, and energy-dispersive X-ray spectroscopy is used to verify chemical composition. Scanning transmission electron microscopy is later used to paint a more complete picture. The advantages of submicron beam XRD over other techniques are discussed in the context of this challenging material system. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：46 / 50

页数：5

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