A study on temperature compensation for the MSRA based on the ring pipe

被引：0
作者：
Guo, Haipeng [1 ,2 ]
Huang, Libin [1 ,2 ]
Li, Wenxiang [1 ,2 ]
Wang, Songli [3 ]
机构：
[1] Southeast Univ, Sch Instrument Sci & Engn, Nanjing 210096, Jiangsu, Peoples R China
[2] Southeast Univ, Key Lab Microinertial Instrument & Adv Nav Techno, Minist Educ, Nanjing 210096, Jiangsu, Peoples R China
[3] Aviat Key Lab Sci & Technol Inertia FACRI, Xian, Shaanxi, Peoples R China
来源：
PROCEEDINGS FIRST INTERNATIONAL CONFERENCE ON ELECTRONICS INSTRUMENTATION & INFORMATION SYSTEMS (EIIS 2017) | 2017年
基金：
中国国家自然科学基金;
关键词：
Micro-accelerator; resonant; ring pipe; temperature compensation;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The Micromechanical Silicon Resonant Accelerometer (MSRA) is an important research direction of the high-precision Micro-accelerator. In order to alleviate the influence of the operating ambient temperature on the performance of MSRA, this paper analyzes temperature characteristics of the ring pipe, builds the mathematical model reflecting the relationship between the voltage and temperature of the ring pipe, and derives the functional relationship between the resonator's resonant frequency and the ring pipe's voltage. Following that, the ring pipe's voltage is adopted for direct temperature compensation of the resonator's resonant frequency. Test results suggest that the temperature compensation method show favorable compensation effects as to differential output of the MSRA, and can efficiently improve the performance of the MSRA.
引用
收藏
页码：492 / 496
页数：5
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