Investigations on non volatile and non rotational phase change random access memory

被引:0
作者
Shi, LP [1 ]
Chong, TC [1 ]
Zhao, R [1 ]
Li, JM [1 ]
Tan, PK [1 ]
Miao, XS [1 ]
Wang, WJ [1 ]
Lee, HK [1 ]
Wei, XQ [1 ]
Yang, HX [1 ]
Lim, KG [1 ]
Song, WD [1 ]
机构
[1] Data Storage Inst, Singapore 117608, Singapore
来源
2005 NON-VOLATILE MEMORY TECHNOLOGY SYMPOSIUM, PROCEEDINGS | 2005年
关键词
D O I
暂无
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
In this work, Phase Change Random Access Memory (PCRAM) was studied theoretically and experimentally. Phase change materials were deposited and their physical parameters were measured. A simulation and design software for PCRAM was developed based on multidisciplinary theories including electrodynamics, thermal conduction, crystallization kinetics and numerical computations. By introducing physical models of PCRAM elements, a general macromodel of the phase change random access memory (PCRAM) elements for HSPICE-based computer simulator is proposed. PCRAM array were designed, fabricated, and tested by using a self built tester. Also, near field optical scan microscope incorporated with fs laser was used to fabricate nano scale PCRAM cells.
引用
收藏
页码:115 / 120
页数:6
相关论文
共 8 条
  • [1] [Anonymous], IEDM
  • [2] FEMTOSECOND IMAGING OF MELTING AND EVAPORATION AT A PHOTOEXCITED SILICON SURFACE
    DOWNER, MC
    FORK, RL
    SHANK, CV
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1985, 2 (04) : 595 - 599
  • [3] HWANG YN, 2003, VLSI TECHN SYST APPL, P29
  • [4] Chalcogenide-based non-volatile memory technology
    Maimon, J
    Spall, E
    Quinn, R
    Schnur, S
    [J]. 2001 IEEE AEROSPACE CONFERENCE PROCEEDINGS, VOLS 1-7, 2001, : 2289 - 2294
  • [5] MOTT NF, 1967, ELECT PROCESSES CRYS
  • [6] *OVONYX TECHN, 1999, OV UN MEM
  • [7] Electronic switching in phase-change memories
    Pirovano, A
    Lacaita, AL
    Benvenuti, A
    Pellizzer, F
    Bez, R
    [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 2004, 51 (03) : 452 - 459
  • [8] TAKAURA N, 2003, EL DEV M 2003 IEDM 0