A study of relative humidity sensor on micro-ball resonator

被引：1

作者：

Ali, U. U. M. ^{[1
]}

Johari, M. A. M. ^{[1
]}

Jusoh, Z. ^{[2
]}

Rahman, H. A. ^{[3
]}

Harun, S. W. ^{[1
]}

机构：

[1] Univ Malaya, Dept Elect Engn, Kuala Lumpur 50603, Malaysia

[2] Univ Teknol Mara Terengganu, Fac Elect Engn, Terengganu 23000, Malaysia

[3] Univ Teknol Mara, Fac Elect Engn, Shah Alam 40450, Selangor, Malaysia

来源：

PHOTONICS MEETING 2019, THE 2ND ANNUAL CONFERENCE AND WORKSHOP | 2019年 / 1371卷

关键词：

QUALITY-FACTOR; MICROCAVITY;

D O I：

10.1088/1742-6596/1371/1/012009

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We investigate the use of a class of whispering gallery mode optical resonators, namely, optical micro-ball resonator (MBR) as a relative humidity (RH) sensor. The MBR is fabricated using fusion splicer at the tip of standard optical fibers; single-mode fibers (SMF-28). The MBR is then optically excited by using an 8 mu m optical microfiber and was found to have a Q-factor of >10(5). The MBR was then employed as a humidity sensor with an RH range of between 40% to 100%. The MBR RH sensor was found to have a sensitivity 0.284 dB/%, linearity >90% and is superior to the bare microfiber in all measured parameters. The MBR RH sensor was also found to have good repeatability and stability compared to bare microfiber.

引用

页数：6

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