Impact of self-heating effect on long-term reliability and performance degradation in CMOS circuits

被引:130
作者
Semenov, O [1 ]
Vassighi, A
Sachdev, M
机构
[1] Univ Waterloo, Dept Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada
[2] Univ Waterloo, Dept Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada
关键词
CMOS technology scaling; long-term reliability; performance degradation; self-heating effect;
D O I
10.1109/TDMR.2006.870340
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
As the technology feature size is reduced, the thermal management of high-performance very large scale integrations (VLSIs) becomes an important design issue. The self-heating effect and nonuniform power distribution in VLSIs lead to performance and long-term reliability degradation. In this paper, we analyze the self-heating effect in high-performance sub-0.18-mu m bulk and silicon-on-insulator (SOI) CMOS circuits using fast transient quasi-de thermal simulations. The impact of the self-heating effect and technology scaling on the metallization lifetime and the gate oxide time-to-breakdown (TBD) reduction are also investigated. Based on simulation results, an optimized clock-driver design is proposed. The proposed layout reduces the hot-spot temperature by 15 degrees C and by 7 degrees C in 0.09-mu m SOI and bulk CMOS technologies, respectively.
引用
收藏
页码:17 / 27
页数:11
相关论文
共 32 条
[1]  
ANDERSON CJ, 2001, P IEEE INT SOL STAT, P232
[2]  
[Anonymous], 2003, INT TECHNOLOGY ROADM
[3]  
[Anonymous], 1998, Intel Technology Journal
[4]  
[Anonymous], 2000, INTELL TECHNOL J
[5]  
BANERJEE K, 2002, INTEL DEV FORUM
[6]  
BLACKBURN DL, 1993, P 9 IEEE SEMI THERM, P88
[7]   Design challenges of technology scaling [J].
Borkar, S .
IEEE MICRO, 1999, 19 (04) :23-29
[8]  
Floyd B. A., 1999, Proceedings of the IEEE 1999 International Interconnect Technology Conference (Cat. No.99EX247), P248, DOI 10.1109/IITC.1999.787135
[9]   ANNEALING-TEMPERATURE DEPENDENCE OF THE THERMAL-CONDUCTIVITY OF LPCVD SILICON-DIOXIDE LAYERS [J].
GOODSON, KE ;
FLIK, MI ;
SU, LT ;
ANTONIADIS, DA .
IEEE ELECTRON DEVICE LETTERS, 1993, 14 (10) :490-492
[10]   High-performance microprocessor design [J].
Gronowski, PE ;
Bowhill, WJ ;
Preston, RP ;
Gowan, MK ;
Allmon, RL .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1998, 33 (05) :676-686