Alfven's critical ionization velocity observed in high power impulse magnetron sputtering discharges

被引:28
作者
Brenning, N. [1 ]
Lundin, D. [1 ]
机构
[1] Royal Inst Technol, Sch Elect Engn, Div Space & Plasma Phys, SE-10044 Stockholm, Sweden
基金
瑞典研究理事会;
关键词
PLASMA; PARAMETERS;
D O I
10.1063/1.4752073
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Azimuthally rotating dense plasma structures, spokes, have recently been detected in several high power impulse magnetron sputtering (HiPIMS) devices used for thin film deposition and surface treatment, and are thought to be important for plasma buildup, energizing of electrons, as well as cross-B transport of charged particles. In this work, the drift velocities of these spokes are shown to be strongly correlated with the critical ionization velocity, CIV, proposed by Alfven. It is proposed as the most promising approach in combining the CIV and HiPIMS research fields is to focus on the role of spokes in the process of electron energization. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4752073]
引用
收藏
页数:5
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