Nanoindentation behaviors of amorphous carbon films containing nanocrystalline graphite and diamond clusters prepared by radio frequency sputtering

被引：31

作者：

Fan, Xue ^{[1
,2
]}

Nose, Kenji ^{[3
]}

Diao, Dongfeng ^{[1
,4
]}

Yoshida, Toyonobu ^{[2
]}

机构：

[1] Xi An Jiao Tong Univ, Key Lab, Educ Minist Modern Design & Rotor Bearing Syst, Sch Mech Engn, Xian 710049, Peoples R China

[2] Univ Tokyo, Grad Sch Engn, Dept Mat Engn, Tokyo 1138656, Japan

[3] Univ Tokyo, Inst Ind Sci, Tokyo 1538505, Japan

[4] Shenzhen Univ, Nanosurface Sci & Engn Res Inst, Shenzhen 518060, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2013年 / 273卷

基金：

中国博士后科学基金;

关键词：

Nanocrystalline; Carbon film; Amorphous; Graphite; Diamond; Nanoindentation; BORON-NITRIDE FILMS; RAMAN-SPECTROSCOPY; INDENTATION; DEPOSITION; STRESS;

D O I：

10.1016/j.apsusc.2013.03.012

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Amorphous carbon (a-C) films were prepared by a radio-frequency sputtering method. Nano structures in the films were controlled by changing the ion irradiation energy and deposition temperature. It was found that nanocrystalline graphite and diamond clusters were embedded in the pure amorphous structure with sizes of approximately 5 nm. a-C films contained nanocrystalline graphite clusters (a-C:NCG) were obtained with the ion energy ranging from 50 to 120 eV and temperature in 300-370 K. a-C film contained nanocrystalline diamond clusters (a-C:NCD) was obtained with 120 eV at 570 K. Nanoindentation behaviors of these carbon films were compared with pure amorphous structured carbon film. The percentage of elastic recoveries of a-C:NCD, a-C, and a-C:NCG films were obtained to be 81.9%, 84.3%, and 87.5%, respectively. Pop-in steps with about 3 nm displacement appeared in loading curves for aC:NCG film, and 10 nm for a-C:NCD film. These results showed that the nanoindentation behaviors of amorphous carbon film containing cross-linked nanocrystalline graphite clusters is better than that of diamond clusters. (c) 2013 Elsevier B.V. All rights reserved.

引用

页码：816 / 823

页数：8

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