Discrete Composite Control of Piezoelectric Actuators for High-Speed and Precision Scanning

被引:70
作者
Liu, Lei [1 ,2 ]
Tan, Kok Kiong [2 ]
Chen, Silu [3 ]
Teo, Chek Sing [3 ]
Lee, Tong Heng [2 ]
机构
[1] Natl Univ Singapore, NUS Grad Sch Integrat Sci & Engn, Singapore 117576, Singapore
[2] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
[3] Singapore Inst Mfg Technol SIMTech, Singapore 638075, Singapore
关键词
Discrete composite control; dynamic hysteresis; piezoelectric actuator; model-based inversion; MOTION TRACKING CONTROL; HYSTERESIS; IDENTIFICATION; COMPENSATION; SYSTEMS; FEEDFORWARD; DYNAMICS;
D O I
10.1109/TII.2012.2221468
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
The scanning accuracy of piezoelectric mechanisms over broadband frequencies is limited due to inherent dynamic hysteresis. This phenomenon has been a key bottleneck to the use of piezoelectric mechanisms in fast and precision scanning applications. This paper presents a systematic model identification and composite control strategy without hysteresis measurement for such applications. First, least squares estimation using harmonic signals is applied to achieve the Preisach density function. Next, the hysteresis output is estimated, such that the non-hysteretic dynamics can be identified. The discrete composite control strategy is proposed with a feedforward-feedback structure. The feedforward controller is the primary component designed for the performance. The secondary proportional-integral (PI) feedback controller is employed to suppress disturbances for robustness. Finally, the identification and composite control strategy is implemented with a dSPACE 1104 board for a real piezoelectric actuator setup. The experimental results indicate that adequate scanning performance can be sustained at a rate higher than the first resonant frequency.
引用
收藏
页码:859 / 868
页数:10
相关论文
共 50 条
  • [31] High precision structured H∞ control of a piezoelectric nanopositioning platform
    Feng, Huan
    Zhou, Hongbo
    Jiang, Congmei
    Pang, Aiping
    PLOS ONE, 2023, 18 (06):
  • [32] High precision tracking of a piezoelectric positioner using a discrete-time sliding mode control
    Geng Wang
    Yanru Zhao
    Yeming Zhang
    Chunchao Chen
    Microsystem Technologies, 2017, 23 : 1831 - 1839
  • [33] Feedback-feedforward control for high-speed trajectory tracking of an amplified piezoelectric actuator
    Saleem, Ashraf
    Mesbah, Mostefa
    Shafiq, Muhammad
    SMART MATERIALS AND STRUCTURES, 2021, 30 (02)
  • [34] Global fast non-singular terminal sliding-mode control for high-speed nanopositioning
    Wang, Geng
    Zhou, Yongsheng
    Ni, Lei
    Aphale, Sumeet S.
    ISA TRANSACTIONS, 2023, 136 : 560 - 570
  • [35] High-Precision Tracking Control of a Piezoelectric Micro-nano Platform Using Sliding Mode Control with the Fractional-Order Operator
    Xu, Rui
    Pan, Wei
    Wang, Zhongshi
    Tian, Dapeng
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 2020, 21 (12) : 2277 - 2286
  • [36] Precise Motion Control of Piezoelectric Actuators Using Modified ZPETC-based Composite Controller
    Tian, Lizhi
    Wu, Jianhua
    Xiong, Zhenhua
    Ding, Han
    2014 IEEE/ASME INTERNATIONAL CONFERENCE ON ADVANCED INTELLIGENT MECHATRONICS (AIM), 2014, : 967 - 972
  • [37] High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and disturbance observer
    Gu, Guo-Ying
    Zhu, Li-Min
    Su, Chun-Yi
    SMART MATERIALS AND STRUCTURES, 2014, 23 (10)
  • [38] Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner
    Wadikhaye, Sachin P.
    Yong, Yuen Kuan
    Bhikkaji, Bharath
    Moheimani, S. O. Reza
    SMART MATERIALS AND STRUCTURES, 2014, 23 (02)
  • [39] Spiral scanning: An alternative to conventional raster scanning in high-speed Scanning Probe Microscopes
    Mahmood, I. A.
    Moheimani, S. O. R.
    2010 AMERICAN CONTROL CONFERENCE, 2010, : 5757 - 5762
  • [40] Dynamic Design of a Novel High-Speed Piezoelectric Flow Control Valve Based on Compliant Mechanism
    Ling, Mingxiang
    He, Xin
    Wu, Mengxiang
    Cao, Lei
    IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2022, 27 (06) : 4942 - 4950