Long Photoconductivity Decay Characteristics in p-Type 4H-SiC Bulk Crystals

被引:11
作者
Okuda, Takafumi [1 ]
Miyake, Hiroki [1 ]
Kimoto, Tsunenobu [1 ]
Suda, Jun [1 ]
机构
[1] Kyoto Univ, Dept Elect Sci & Engn, Kyoto 6158510, Japan
基金
日本学术振兴会;
关键词
PERSISTENT PHOTOCONDUCTIVITY; DX CENTERS; SEMICONDUCTORS;
D O I
10.7567/JJAP.52.010202
中图分类号
O59 [应用物理学];
学科分类号
摘要
We investigated the photoconductivity decay characteristics of p-type 4H-SiC bulk crystals by differential microwave photoconductance decay (mu-PCD) measurements using a 349-nm laser as an excitation source. The decay time at room temperature was 2600 mu s, which is much longer than that of n-type 4H-SiC bulk crystals (40 ns). Decay time decreased with increasing temperature, resulting in 120 mu s at 250 degrees C, and the activation energy of decay time was determined to be 140 +/- 10 meV. Long decay characteristics were also observed by below-band-gap excitation at 523 nm. (C) 2013 The Japan Society of Applied Physics
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页数:3
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