Thin zoom camera module by large-stroke micromachined deformable mirrors

Miniaturization is the key point to design image system for portable devices. Motor-driven lens technique is the traditional way to achieve auto-focus and zoom functions, this method usually requires a larger space and causes greater power consumption. Reflective optics is a technology not only can make the space application become more efficient and flexible, but also has the advantage that it induces low chromatic aberrations. In this paper, we use organic deformable mirror (DM) as reflective element of the system. PDMS used as an actuated membrane of DM has lower young's modulus and residual stress. The maximum stoke is 90 um and corresponding diopter is 39.964m((-1)). The system we designed with MEMS deformable mirror is a 5M pixel zoom image system which is only 10mm in thickness before packaging and 16mm in thickness after packaging. The smallest EFL (effective focal length) is 4.7 mm at full field angle of 52 and the f/# is 4.4. The longest EFL of the module is 9.4 mm and the f/# is 6.4.