Application of pulsed liquid-injection MOCVD to the growth of ultrathin epitaxial oxides for magnetic heterostructures

被引：6

作者：

Dubourdieu, C

Rosina, M

Audier, M

Weiss, E

Sénateur, JP

Dooryhee, E

Hodeau, JL

机构：

[1] Ecole Natl Super Phys Grenoble, Mat & Genie Phys Lab, INPG, CNRS,UMR 5628, F-38402 St Martin Dheres, France

[2] CNRS, Cristallog Lab, F-38042 Grenoble, France

[3] SAS, IEE, Bratislava 84239, Slovakia

来源：

THIN SOLID FILMS | 2001年 / 400卷 / 1-2期

关键词：

metal-organic chemical vapor deposition (MOCVD); superlattice; heterostructure; manganite; strain;

D O I：

10.1016/S0040-6090(01)01457-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We illustrate the capabilities of pulsed-liquid injection metal-organic chemical vapor deposition in the nano-engineering of complex oxides with results obtained on (La0.7Sr0.3MnO3/SrTiO3)(15) (LSMO/STO) superlattices. Superlattices with ultrathin films of a few monolayers have been successfully prepared, as shown by synchrotron radiation diffraction experiments. Lane oscillations were observed between the satellite peaks, indicating a smooth upper surface. Sets of superlattices with varying LSMO or STO thickness were synthesized on different substrates (LaAlO3, SrTiO3, MgO). By varying the relative thickness of each compound and changing the substrate, the strain in the stackings could be changed. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：81 / 84

页数：4

共 7 条

[1] STRUCTURAL REFINEMENT OF SUPERLATTICES FROM X-RAY-DIFFRACTION
FULLERTON, EE
SCHULLER, IK
VANDERSTRAETEN, H
BRUYNSERAEDE, Y
[J]. PHYSICAL REVIEW B, 1992, 45 (16): : 9292 - 9310
[2] KREISEL J, UNPUB PHYS REV B
[3] Sénateur JP, 2000, ADV MATER OPT ELECTR, V10, P155, DOI 10.1002/1099-0712(200005/10)10:3/5<155::AID-AMO406>3.0.CO
[4] 2-2
[5] SENATEUR JP, 1994, Patent No. 730671
[6] SENATEUR JP, 1993, Patent No. 2707671
[7] SENATEUR JP, 1999, Patent No. 945162

← 1 →