Determination of the transmission and correction of electron spectrometers, based on backscattering and elastic reflection of electrons

Quantitative surface, interface and thin film analysis is based in practice on reference standard samples. The elastic reflection coefficient r(e) of a surface is a material parameter that can be determined from the elastic peak intensity. Absolute values of r(e) have been published by several authors, mainly working with a retarding field analyser. Koch published the angular distribution r(e)(Theta) %/sr for a number of elements covering the E = 400-2400 eV energy range. Goto developed a cylindrical mirror analyser for elastic current measurements and published results on graphite, Ni, Ag, Cu, Au and Si. The transmission of the ESA 31 (ATOMKI) and DESA 100 electron spectrometer of Staib were determined from the backscattering spectra of standard samples. Comparison of experimental r(e)(E,Z, 138 degrees) data of Koch with those of Goto exhibited nearly constant ratio close to 5 that slowly decreased with E. The transparency of Goto's CMA was found nearly 20%, near to his estimated value. The elastic current data can be affected by the spectrometer energy resolution integrating the loss spectrum adjacent to the elastic peak. Spectrometer correction for that is needed. The transmission (response) of the A 31 and DESA 100 was determined. The elastic peak can be used as internal reference standard for quantitative AES and electron energy loss spectroscopy. (C) 1999 Elsevier Science B.V. All rights reserved.