Ways of increasing the high performance of mass-spectrometric automated leak testers

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作者
Vinogradov, SV
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TB3 [工程材料学];
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0805 ; 080502 ;
摘要
We consider ways of increasing the performance of mass-spectrometric automated leak testers (ALTs). The leak-testing method described can find widespread application in high-performance ALTs.
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页码:276 / 277
页数:2
相关论文
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  • [1] VINOGRADOV SV, Patent No. 1631336