Electron-shading effect on the horizontal aligned growth of carbon nanotubes

被引:19
作者
Chai, Yang [1 ]
Xiao, Zhiyong [1 ]
Chan, Philip C. H. [1 ]
机构
[1] Hong Kong Univ Sci & Technol, Dept Elect & Comp Engn, Hong Kong, Hong Kong, Peoples R China
关键词
carbon nanotubes; nanofabrication; plasma CVD;
D O I
10.1063/1.3077155
中图分类号
O59 [应用物理学];
学科分类号
摘要
Based on the well-accepted electron-shading theory during plasma processing, we designed microstructures to control the local built-in electric-field on the substrate surface. The distortion magnitude of the electric-field is largest near the sidewalls of the microstructures, creating a horizontal electric-field in this region. We showed that the horizontally aligned carbon nanotubes (CNTs) were grown by making use of this built-in electric-field during the plasma-enhanced chemical vapor deposition process, with a tactical choice of geometries and materials of the microstructures on the substrate. This technique opens up a way to selectively and controllably grow horizontally aligned CNTs on the substrate surface.
引用
收藏
页数:3
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