Surface Acoustic Wave Sensors for Ammonia Detection at Room Temperature Based on SnO2/Co3O4 Bilayers

被引：32

作者：

Constantinoiu, Izabela ^{[1
]}

Miu, Dana ^{[1
]}

Viespe, Cristian ^{[1
]}

机构：

[1] Natl Inst Lasers Plasma & Radiat Phys, Laser Dept, RO-077125 Bucharest, Romania

来源：

JOURNAL OF SENSORS | 2019年 / 2019卷

关键词：

GAS SENSOR; CO3O4; SENSITIVITY; FILMS;

D O I：

10.1155/2019/8203810

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The selectivity of a SAW (surface acoustic wave) sensor, with a Co3O4 sensitive thin film for NH3 (ammonia) and the influence of SnO2 on its sensitivity, was studied. Thin films were deposited by pulsed laser deposition (PLD) on quartz SAW sensor substrates. Two sensors with different types of sensitive films were developed: a Co3O4 thin film sensor (S1) and a SnO2/Co3O4 thin film sensor (S2). The sensitive films were deposited in conditions which ensured a porous structure. The sensors were tested in the presence of three gases: NH3, methanol, and toluene. The selectivity of Co3O4 for NH3 was determined from the difference in the frequency shifts of the sensor for NH3 and for VOCs (volatile organic compounds). The positive influence of SnO2 on the sensitivity of sensor S2 was observed from the lower limit of detection (LOD) of this sensor and from the differences in frequency shifts between sensor S1 and sensor S2.

引用

页数：6

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