Degradation of the piezoelectric response of sputtered c-axis AlN thin films with traces of non-(0002) x-ray diffraction peaks

被引：82

作者：

Sanz-Hervás, A ^{[1
]}

Clement, M ^{[1
]}

Iborra, E ^{[1
]}

Vergara, L ^{[1
]}

Olivares, J ^{[1
]}

Sangrador, J ^{[1
]}

机构：

[1] Univ Politecn Madrid, Grp Microsistemas & Mat Elect, Dept Tecnol Elect, Escuela Tecn Super Ingn Telecommun, E-28040 Madrid, Spain

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 16期

关键词：

D O I：

10.1063/1.2191425

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have observed the apparently anomalous behavior of sputtered AlN thin films that exhibit poor piezoelectric response in spite of having (0002) preferred orientation and narrow rocking curve with full width at half maximum below 2 degrees; however, other AlN films with weak 0002 x-ray diffraction peak and rocking curve as wide as 8 degrees provide a good value of the piezoelectric coefficient d(31) (2.1 pm/V). The critical difference between both types of films is the presence of traces of non-(0002) reflections in the x-ray diffraction patterns of the former. Non-(0002) reflections may be related to defects (probably, inversion domains) that significantly reduce the net piezoelectric field. (c) 2006 American Institute of Physics.

引用

页数：3

共 13 条

[1] Structural, optical, and acoustic characterization of high-quality AlN thick films sputtered on Al2O3(0001) at low temperature for GHz-band electroacoustic devices applications [J].