Near-Field Scanning Millimeter-wave Microscope Combined with a Scanning Electron Microscope

被引：0
|
作者：
Haddadi, Kamel [1 ]
Haenssler, Olaf C. [1 ,2 ]
Boyaval, Christophe [1 ]
Theron, Didier [1 ]
Dambrine, Gilles [1 ]
机构：
[1] Univ Lille, Inst Elect Microelect & Nanotechnol, F-59652 Villeneuve Dascq, France
[2] Carl von Ossietzky Univ Oldenburg, Oldenburg, Germany
来源：
2017 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS) | 2017年
关键词：
Scanning near-field microwave microscopy (NSMM); millimeter-wave; atomic force microscopy (AFM); scanning electron microscope (SEM); MICROWAVE MICROSCOPY; INTERFEROMETRIC-TECHNIQUE;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The design, fabrication and experimental validation of a novel near-field scanning millimeter-wave microscope (NSMM) built inside a scanning electron microscope (SEM) is presented. The instrument developed can perform hybrid characterizations by providing simultaneously atomic force, complex microwave impedance and electron microscopy images of a sample with nanometer spatial resolution. By combining the measured data, the system offers unprecedentable capabilities for tackling the issue between spatial resolution and high frequency quantitative measurements.
引用
收藏
页码：1656 / 1659
页数：4
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