Improved ionization efficiency in MEMS-type ion-sorption micropump

被引：0

作者：

Grzebyk, Tomasz ^{[1
]}

Gorecka-Drzazga, Anna ^{[1
]}

Dziuban, Jan A. ^{[1
]}

机构：

[1] Wroclaw Univ Sci & Technol, Fac Microsyst Elect & Photon, 11-17 Janiszewski St, PL-50372 Wroclaw, Poland

来源：

2016 29TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC) | 2016年

关键词：

ionization; field emission; secondary emission of electron; micropump;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we demonstrate how to increase ionization efficiency inside a MEMS-type ion-sorption micropump, and therefore have a possibility to obtain very high vacuum inside miniature nanoelectronics devices. Three different approaches were utilized to achieve this goal - electrodes of the micropump were covered with (or made of) nanomaterials having either good field emission properties (carbon nanotubes) or high secondary emission coefficient (magnesium oxide nanopowder and porous silicon). For all of the modified electrodes a significant improvement was observed, in the case of MgO discharge current increased more than 1000 times.

引用

页数：2